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JB/T 5630-1991 半导体器件扩散炉 能耗分等

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基本信息
标准名称:半导体器件扩散炉 能耗分等
中标分类: 机械 >> 机械综合 >> 技术管理
发布部门:机械电子工业部
发布日期:1991-09-13
实施日期:1992-07-01
首发日期:1900-01-01
作废日期:1900-01-01
提出单位:机械电子工业部生产司
归口单位:机械电子工业部机械标准化研究所
起草单位:国营七○○厂
起草人:钱祖权、黄淑敏
出版社:机械工业出版社
出版日期:1992-07-01
页数:4 页
适用范围

本标准规定了半导体器件扩散炉(以下简称扩散炉)能耗分等。
本标准适用于电子工业企业半导体器件制造过程中用作各种扩散、氧化、退火和合金工艺以及对其他材料进行特殊处理的扩散炉。

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所属分类: 机械 机械综合 技术管理
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Product Code:SAE J1975
Title:Case Hardenability of Carburized Steels
Issuing Committee:Carbon And Alloy Steels Committee
Scope: This SAE Information Report summarizes the characteristics of carburized steels and factors involved in controlling hardness, microstructure, and residual stress. Methods of determining case hardenability are reviewed, as well as methods to test for freedom from non-martensitic structures in the carburized case. Factors influencing case hardenability are also reviewed. Methods of predicting case hardenability are included, with examples of calculations for several standard carburizing steels. A bibliography is included in 2.2. The references provide more detailed information on the topics discussed in this document.Product Code:SAE AMS4079
Title:Aluminum Alloy, Drawn, Round, Seamless, Tubing, 1.0Mg - 0.60Si - 0.28Cu - 0.20Cr (6061-O), Close Tolerance, Annealed
Issuing Committee:Ams D Nonferrous Alloys Committee
Scope:This specification covers an aluminum alloy in the form of drawn, round, seamless tubing.This tubing has been used typically for ducts requiring small radius bends and moderate strength after solution and precipitation heat treatment, but usage is not limited to such applications.